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Effect of gas flow on the growth of In-rich AlInN films by metal-organic chemical vapor deposition
http://hdl.handle.net/10098/2162
http://hdl.handle.net/10098/21626a61bcd8-f220-403f-8e9d-2c9300d1f654
名前 / ファイル | ライセンス | アクション |
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J.Applied_.Physics_Vol.106..pdf (550.0 kB)
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American Institute of Physics
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2009-10-09 | |||||
タイトル | ||||||
タイトル | Effect of gas flow on the growth of In-rich AlInN films by metal-organic chemical vapor deposition | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_1843 | |||||
資源タイプ | other | |||||
著者 |
康, 亭亭
× 康, 亭亭× 山本, 政智× 田中, 幹康× 橋本, 明弘× 山本, 暠勇× KANG, Ting-Ting× YAMAMOTO, Masatomo× TANAKA, Mikiyasu× HASHIMOTO, Akihiro× YAMAMOTO, Akio |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Indium-rich AlInN are grown by metal-organic(MO) chemical vapor deposition using trimethylaluminum, trimethylindium, and ammonia. Under the conservation of MO influx, the effects of gas flow in the MO route on AlInN growth and Al-related parasitic reaction are investigated. With an increase in this gas flow, the suppression of Al-related parasitic reaction, i.e., enhancement in Al content incorporation and improvement of crystalline quality, is satisfactorily shown until the occurring of severe phase separation. Accordingly, Al content x in AlxIn1-xN can be tuned from x=0.02 to 0.26. The Raman spectra of those AlInN samples with phase separation are analyzed by the resonant excitation effect and two-mode behavior for A1(LO). Finally, we propose a phase diagram to interpret the phase separation and Al content evolution under the influence of gas flow. | |||||
書誌情報 |
Journal of Applied Physics 巻 106, p. 053525-1-053525-4, 発行日 2009-08 |
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出版者 | ||||||
出版者 | American Institute of Physics | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 218979 | |||||
書誌レコードID | ||||||
識別子タイプ | NCID | |||||
関連識別子 | TD00006761 | |||||
DOI | ||||||
関連タイプ | isVersionOf | |||||
識別子タイプ | DOI | |||||
関連識別子 | 10.1063/1.3212969 | |||||
著者版フラグ | ||||||
出版タイプ | AO | |||||
出版タイプResource | http://purl.org/coar/version/c_b1a7d7d4d402bcce |